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Complementary data of RBS, NRA and SIMS on diffusion processes during friction in nitride implantation films
Author(s) -
Pivin J. C.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740130109
Subject(s) - tribometer , diffusion , tin , materials science , x ray photoelectron spectroscopy , secondary ion mass spectrometry , nitride , metallurgy , ion implantation , oxygen , ion , nanotechnology , layer (electronics) , chemical engineering , chemistry , tribology , thermodynamics , physics , organic chemistry , engineering
The purpose of the present paper is to discuss the possibilities and limits of three analytical techniques—namely RBS, NRA and SIMS—in studies of the worn surfaces of thin films. The chosen examples are not the most simple since the obtainable data by means of each technique are limited by the nature of the films, riders and atmosphere of friction tests. Surfaces of Ti or Fe implanted with N ions were worn in air against steel or silica balls, using a tribometer specially conceived for further surface analysis. Different mechanisms of oxidative wear have been shown based on the data of the above techniques and punctual complementary analysis by XPS or TEM. They are a diffusion of oxygen in the bulk of TiN, FeN solid solutions, through short paths and cracks in Ti 2 N, TiN compounds. In any case, the N diffusion during friction, which has been often invoked to explain the durable wear resistance of implanted metals, has not been observed.