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Esca and reels characterization of electrically conductive polyimide obtained by ion bombardment in the keV range
Author(s) -
Marletta Giovanni,
Oliveri Carmelo,
Ferla Giuseppe,
Pignataro Salvatore
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120802
Subject(s) - polyimide , ion , carbonization , materials science , electrical resistivity and conductivity , polyamide , amorphous solid , polymer , electrical conductor , analytical chemistry (journal) , chemistry , polymer chemistry , composite material , organic chemistry , scanning electron microscope , layer (electronics) , electrical engineering , engineering
Polymide films were bombarded with Ar + at 150 keV at various doses from 5 × 10 12 to 2 × 10 17 ions cm −2 . Ion bombardment was found to produce a drastic decrease of the electrical resistivity of the polymide from about 10 16 to 3 × 10 −3 Ω cm, the effect being dependent on the ion dose. The chemical structure of the conductive films obtained was characterized by means of ESCA and REELS techniques. The modification of the original polymer seems to proceed at low ion doses (up to 5 × 10 14 ions cm −2 ) by means of the progressive elimination of the carbonyl groups and the related destruction of the imidic rings, while at high doses (from 5 × 10 15 ions cm −2 ) the carbonization of the polyimide occurs with the production of an amorphous carbon still containing significant amount of residual N and O atoms.