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Detection of substrate‐related species during depth profiling of a‐Si:H films with SIMS
Author(s) -
Herion J.,
Beyer W.,
Wagner H.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120609
Subject(s) - physics