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ARXPS study of NbN sputter deposition on MgO and Nb 2 O 5 : Damage, epitaxy and growth
Author(s) -
Halbritter J.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120608
Subject(s) - sputtering , epitaxy , materials science , physics , chemistry , nanotechnology , thin film , layer (electronics)