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Study of the redistribution of high dose Sb and P implants in silicon by combination of SIMS and TEM
Author(s) -
Stingeder G.,
Grasserbauer M.,
Pongratz P.,
Kuhnert W.,
Wippel I.,
Skalicky P.,
Guerrero E.,
Pötzl H.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120607
Subject(s) - technical university , library science , engineering , engineering physics , computer science