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Damage production in hydrogen‐implanted silicon
Author(s) -
Lahtinen J.,
Vehanen A.,
Punkka E.,
Hautojärvi P.,
Kein J.,
Hautala M.,
Rauhala E.,
Karttunen V.,
Kuronen A.,
Räisänen J.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120513
Subject(s) - research centre , technical university , chinese academy of sciences , physics , library science , engineering , computer science , political science , law , china