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Crystaline effects in single crystal and highly textured TiN x films
Author(s) -
Strandberg C.,
Perry A. J.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120213
Subject(s) - tin , crystallinity , single crystal , materials science , crystal (programming language) , ion , spectral line , crystallography , analytical chemistry (journal) , chemistry , metallurgy , physics , chromatography , organic chemistry , astronomy , computer science , programming language
The results of a study of AES spectra obtained from single crystal and highly textured fine grained TiN x films are presented. The existence of specimen crystallinity effects is demonstrated particularly in the single crystal samples. These can be large enough to affect quantitative analysis. Unexpected changes in the spectra were also found on changing the incident angle of the ion beam.