Premium
Simulation of the LMM auger spectra of copper
Author(s) -
Dubot P.,
Jousset D.,
Pinet V.,
Pellerin F.,
Langeron J. P.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120207
Subject(s) - auger , auger electron spectroscopy , x ray photoelectron spectroscopy , ionization , spectral line , copper , monte carlo method , electron , auger effect , atomic physics , relaxation (psychology) , electron spectroscopy , range (aeronautics) , chemistry , computational physics , materials science , physics , ion , nuclear magnetic resonance , nuclear physics , statistics , social psychology , psychology , mathematics , organic chemistry , astronomy , composite material
Quantitative Auger analysis is much more difficult to achieve than quantitative XPS, as the latter shows only one photoelectron peak when the former exhibits many relaxation peaks laying over a 100 ev range. A good way to check our understanding of the Auger process is to simulate spectra. For that we need to get an estimation of (i) the ionization probability and its variation with depth, (ii) the contribution of each ionization and relaxation processes, and (iii) the type of interaction between electron and solid. As the phenomena are basically the same for the transport of Auger electrons as for primary electrons, we used the same physical parameters and simulation models (layer by layer and Monte Carlo) as we previously used for the determination of the background in copper. A comparison between calculated and experimental results is presented.