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Differential reflectometry and its application in materials science
Author(s) -
Hummel Rolf E.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740120105
Subject(s) - reflectometry , semiconductor , materials science , semiconductor materials , differential (mechanical device) , optoelectronics , nanotechnology , engineering physics , computer science , physics , engineering , aerospace engineering , time domain , computer vision
The differential reflectometer is briefly described, Its use as a fast, simple, and non‐destructive surface analytical instrument is stressed and several examples are provided. Among them are a study of the electronic structure of alloys, the identification and evaluation of surface films in situ , and some investigations which elucidate the damage which is inflicted on semiconductor materials and electronic devices by ion implantation and other means.