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An NBS standard reference material for depth profile analysis
Author(s) -
Fine Joseph,
Navinšek Boris
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740111010
Subject(s) - characterization (materials science) , materials science , mineralogy , analytical chemistry (journal) , geology , chemistry , nanotechnology , environmental chemistry
A periodically modulated thin‐film material, specifically developed for calibrating sputtered depths and erosion rates, is available from NBS. Information on its structure and characterization is summarized.
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