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Technique of sequential surface analysis with ISS and AES
Author(s) -
Shimizu Ryuichi
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740111004
Subject(s) - auger electron spectroscopy , electron microprobe , microprobe , ion , layer (electronics) , surface layer , auger , electron spectroscopy , chemistry , spectroscopy , analytical chemistry (journal) , alloy , atomic physics , mineralogy , nuclear physics , physics , organic chemistry , quantum mechanics , chromatography
The development of a new approach is briefly described, which enables Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS) to be performed sequentially with a commercial‐type Auger microprobe. These sequential AES and ISS measurements were applied to depth composition analysis of the altered layer formed in the surface of AlMg(60 at%) alloy under ion bombardment. A simple analysis has suggested that the ion bom‐bardment forms an altered layer in the surface, which consists of Mg‐rich composition at the top‐most atomic layer, followed by the depletion layers of Mg atoms extending over a few tens of atomic layers deep.