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Recent developments in spatially resolved ESCA
Author(s) -
Chaney Robert L.
Publication year - 1987
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740100108
Subject(s) - resolution (logic) , range (aeronautics) , sample (material) , electron spectroscopy , image resolution , computer science , experimental data , spectral resolution , electron , materials science , optics , computational physics , biological system , analytical chemistry (journal) , chemistry , physics , spectral line , artificial intelligence , mathematics , biology , statistics , chromatography , quantum mechanics , astronomy , composite material
ESCA (electron spectroscopy for chemical analysis) is a general purpose analytical technique for studying the surface properties of a wide variety of materials and material problems. To meet the widest range of experimental conditions, an ESCA instrument should be easily adaptable to the problem under study. The experimental parameters that must be optimized include: spatial resolution; spectral resolution; spectral purity; sample damage; sample presentation; speed of analysis; depth of analysis; sensitivity. In this paper, we will discuss various concepts used to control these experimental parameters. The discussion will provide an analysis of various methods used to obtain high spatial resolution. Finally, we will describe how to optimize instrument performance for some specific experimental situations.