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Characterization of CVD‐layers by scanning Auger microscopy
Author(s) -
Riahi A.,
Puchhammer M.,
Störi H.,
Colombier C.,
Lux B.
Publication year - 1986
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740090526
Subject(s) - materials science , physics , humanities , art