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Quantitative analysis of silicon‐silicon nitride interfacial regions using auger electron spectroscopy
Author(s) -
Remmerie J.,
Vandervorst W.,
Maes H. E.
Publication year - 1986
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740090523
Subject(s) - auger electron spectroscopy , citation , silicon , auger , library science , computer science , physics , atomic physics , optoelectronics , nuclear physics