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On the use of the quartz crystal microbalance for surface analysis in combination with surface sensitive spectroscopies
Author(s) -
Onsgaard J.,
Huang W.,
Taglauer E.
Publication year - 1986
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740090207
Subject(s) - quartz crystal microbalance , auger electron spectroscopy , sputtering , analytical chemistry (journal) , quartz , auger , ion , materials science , chemistry , thin film , nanotechnology , adsorption , atomic physics , composite material , physics , organic chemistry , chromatography , nuclear physics
The quartz crystal microbalance (QCM) has a wide range of applications in surface physics and surface chemistry. We present result obtained by combining the high areal density sensitivety of the QCM with surface sensitive spectroscopies like Auger electron spectroscopy (AES) and ion surface scattering (ISS). One type of experiments deals with measurements of sputtering yield variations during ion profiling of metal‐metal interfaces, situated at the surface of the QCM, as a function of varying surface composition. A new method for online measurements of angular distributions of sputtered particles from a solid surface, by utilizing the QCM's as collectors of the ejected particles, is the subject of the other type of experiment.