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Quantitative non‐destructive in‐depth composition information from XPS
Author(s) -
Tougaard S.
Publication year - 1986
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740080607
Subject(s) - x ray photoelectron spectroscopy , analytical chemistry (journal) , composition (language) , energy (signal processing) , function (biology) , chemistry , transition metal , metal , atomic physics , physics , nuclear magnetic resonance , linguistics , philosophy , biochemistry , organic chemistry , chromatography , quantum mechanics , evolutionary biology , biology , catalysis
The XPS peak shape from inhomogeneous transition metals is studied theoretically under variation of the path length R travelled by the photoelectron in the solid, the XPS peak energy E p , and the particular metal M . The variation in peak shape is characterized by a single parameter D = A p / B which is the ratio of the peak area to the increase in background signal 30 eV below the peak energy. It is found that D is a strong function of R , a moderate function of E p and to first order independent of M . This gives theoretical support to the idea suggested previously of using D for fast non‐destructive extraction of in‐depth composition information. To a good approximation we have D ( R,E p ) = (425+ E p ) × R −1.3+1.4×10 −4 E p, with E p in eV, R in Å and D ( R,E p ) in eV. The practical use of this function in the analysis of experimental data is discussed.