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An experimental investigation of backscatter factors in Auger spectroscopy
Author(s) -
Underhill P. R.
Publication year - 1986
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740080204
Subject(s) - overpotential , auger , backscatter (email) , monte carlo method , auger electron spectroscopy , substrate (aquarium) , atomic physics , computational physics , spectroscopy , chemistry , materials science , physics , nuclear physics , electrode , statistics , geology , oceanography , quantum mechanics , computer science , electrochemistry , wireless , telecommunications , mathematics
A systematic experimental investigation of relative backscatter factors as a function of primary beam energy and substrate atomic number using the carbon KLL and copper LMM Auger peaks is described. The results are compared to the Monte Carlo calculations of Ichimura et al. (1981). Good agreement between experiment and theory is found in the case of large overpotentials but the theorietical calculations are found to overestimate the backscatter contribution with increasing Z as the overpotential decreases.