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Energy calibration secondary standards for X‐ray photoelectron spectrometers
Author(s) -
Evans Stephen
Publication year - 1985
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740070609
Subject(s) - x ray photoelectron spectroscopy , calibration , spectrometer , analytical chemistry (journal) , auger , scaling , atomic physics , x ray , binding energy , chemistry , physics , optics , nuclear magnetic resonance , geometry , mathematics , quantum mechanics , chromatography
The selection of elementary calibration standards for X‐ray photoelectron spectrometers is discussed; it is suggested that Zn and Ga may be more satisfactory routine single‐element standards than Cu, Ag or Au. Binding energies for the 2p 3/2 and 3d photoelectron peaks from elemental Zn, Ga (and Ge) and for the most intense LMM Auger peaks from Zn and Ga are reported and relevant energy separations compared with published Lα X‐ray energies. The instrumental voltage scale was calibrated to a precision of 0.0035% (one standard deviation, SD) by reference to published data for Cu and Au and the SD of the measured peak energies were generally ⩽0.03 eV. Taking residual voltage scaling uncertainties into account, the largest energy separations in the data for Zn and Ga should be accurate to 0.05 eV (one SD).