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Quantitative analysis of complex Auger spectra by least‐squares fitting with prefiltering of spectra
Author(s) -
Sekine T.,
Mogami A.
Publication year - 1985
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740070607
Subject(s) - deconvolution , spectral line , filter (signal processing) , auger , least squares function approximation , noise (video) , chemistry , digital filter , analytical chemistry (journal) , optics , computational physics , physics , mathematics , statistics , atomic physics , computer science , artificial intelligence , chromatography , astronomy , estimator , image (mathematics) , computer vision
The ‘filter‐fit’ method, which was originally developed for the analysis of energy dispersive x‐ray data, has been applied to the quantitative analysis of Auger spectra for the first time. It is a digital peak deconvolution technique in the presence of the continuum background using least‐squares fitting calculations, including the prefiltering of spectra. To evaluate this method, composite‐known spectra digitally composed of Cr, O and Ni standard spectra were prepared. For the deconvolution of Cr and O peaks under the influence of the Ni peak tail, the present method showed remarkable advantage over the conventional least‐squares fitting without prefiltering. As a digital filter for prefiltering, derivative filters of different orders and ‘top‐hat’ filter were examined. In derivative filters, it was found that there is an optimum order in the balance of advantage of suppressing the background and disadvantage of losing peak intensity. The ‘top‐hat’ filter is a very practical filter in both background suppression and noise attenuation.