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Beam brightness modulation (BBM) method as applied to Auger electron spectroscopy
Author(s) -
Mogami A.
Publication year - 1985
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740070509
Subject(s) - auger electron spectroscopy , brightness , modulation (music) , spectrum analyzer , spectroscopy , auger , beam (structure) , spectral line , dynamic range , electron spectroscopy , cathode ray , optics , signal (programming language) , range (aeronautics) , materials science , chemistry , electron , atomic physics , physics , computer science , acoustics , quantum mechanics , astronomy , nuclear physics , composite material , programming language
The principle of the beam brightness modulation (BBM) method, as well as such advanced characteristics as high speed response, wide dynamic range of primary beam currents, selective signal detection, and signal‐to‐noise superiority in N ( E ) spectra, are reported by comparing with both the conventional analyzer energy modulation and the pulse counting methods. Some device‐related technologies for the BBM method are also described as well as advantages of Auger electron spectroscopy (AES) using N ( E ) spectra obtained by the BBM method.