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Absolute background determination in XPS
Author(s) -
Tougaard S.,
Jørgensen B.
Publication year - 1985
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740070105
Subject(s) - x ray photoelectron spectroscopy , kinetic energy , electron , range (aeronautics) , deconvolution , atomic physics , energy (signal processing) , analytical chemistry (journal) , chemistry , physics , materials science , optics , nuclear magnetic resonance , nuclear physics , quantum mechanics , chromatography , composite material
A recent method, which contains no adjustable parameters, is used to deconvolute the background intensity of inelastically scattered electrons from the XPS spectrum of silver in the 200–900 eV kinetic energy range. The inelastic background signal is found to match the measured spectrum in the energy regions between peaks. In the deconvoluted spectrum the behaviour on the low energy side of each peak is similar, with a tail of primary electrons extending ∼50 eV below the peak. The range of validity of the deconvolution procedure is discussed.