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Channeling effects in polycrystalline copper—a serious impediment to quantitative Auger analysis?
Author(s) -
Doern F. E.,
Kover L.,
McIntyre N. S.
Publication year - 1984
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740060607
Subject(s) - auger , microprobe , auger electron spectroscopy , copper , crystallite , auger effect , yield (engineering) , electron microprobe , chemistry , atomic physics , intensity (physics) , resolution (logic) , materials science , analytical chemistry (journal) , optics , crystallography , mineralogy , physics , nuclear physics , metallurgy , organic chemistry , chromatography , artificial intelligence , computer science
Variations in absolute Auger intensity of as much as 40% are reported for the analysis of polycrystalline copper surfaces in a high resolution scanning Auger microprobe. The angular dependent Auger yield is correlated with channeling effects of the incident electron beam. A correction procedure based upon ratioing the Auger peak intensity to the elastically backscattered electron peak, combined with an angular averaging technique can reduce the crystallographically induced Auger yield variations by a factor of four.