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Observation of CuNi alloy surfaces by low wattage glow discharge emission spectrometry
Author(s) -
Wagatsuma Kazuaki,
Hirokawa Kichinosuke
Publication year - 1984
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740060404
Subject(s) - sputtering , auger electron spectroscopy , glow discharge , alloy , copper , analytical chemistry (journal) , spectroscopy , auger , materials science , chemistry , nickel , electron spectroscopy , atomic physics , metallurgy , plasma , thin film , nanotechnology , physics , chromatography , quantum mechanics , nuclear physics
Glow discharge sputtering on CuNi alloy surfaces is studied by optical emission spectroscopy and Auger electron spectroscopy. The relative intensity of Cu emission lines against Ni lines increases with a decrease in supplied power in very low wattage regions. These changes of the relative intensities principally depend on the sputtering parameters of constituent elements in CuNi alloy; that is, the preferential sputtering of copper. Surface analysis by Auger electron spectroscopy shows that when samples are sputtered by glow discharges in very low power operations, the deformation layer which has a nickel‐enriched composition exists on alloy surfaces. We discuss the effect of glow discharge sputterings on surface compositions using the two analytical methods described above.