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A practical method for determining backscattering factors and matrix correction in quantitative aes analysis of binary alloys
Author(s) -
Streubel Peter,
Berndt Helga
Publication year - 1984
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740060203
Subject(s) - binary number , matrix (chemical analysis) , simple (philosophy) , alloy , computational physics , materials science , physics , mathematical analysis , mathematics , metallurgy , epistemology , philosophy , arithmetic , composite material
Abstract The composition‐dependent backscattering factor in quantitative AES analysis is investigated by comparing experimental results from different approaches with several theoretical methods. Backscattering factor ratios are presented as a function of the composition of homogeneous CuPd alloys cleaned in situ by scribing. The values were calculated in a simple way by the proposed approximation method which takes into account the importance of the primary electron incident angle. This approach can be recommended for practical use in determining matrix correction. Application of the approximation method for matrix correction to different binary alloy systems gives a better agreement with the experimental matrix correction factor than Reuter's backscattering factor equation. Matrix correction factors for binary alloys were evaluated by a simple equation considering the weak linear composition dependence which was found experimentally. With matrix correction the accuracy of quantitative AES analysis can be improved by 5% or more as was shown for the CuPd alloys.