Premium
Simultaneous XRF and XPS analysis
Author(s) -
Castle J. E.,
Castle M. D.
Publication year - 1983
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740050505
Subject(s) - x ray photoelectron spectroscopy , bremsstrahlung , spectral line , range (aeronautics) , excited state , sampling (signal processing) , analytical chemistry (journal) , radiation , fluorescence , materials science , chemistry , atomic physics , optics , physics , nuclear magnetic resonance , environmental chemistry , detector , photon , astronomy , composite material
The concept of utilising the x‐ray fluorescence spectrum, excited by bremsstrahlung radiation, whilst undertaking photoelectron spectroscopy is not new. However, it is only with modern multiprobe instruments and high quality data systems that the simultaneous display of both spectra becomes practicable. This paper explores the effective sampling depth and sensitivities across the energy range 1 to 10 keV. It concludes that the attachment of x‐ray detection equipment to an ESCA instrument is a practical and cost effective solution to the need to probe rather greater depths than XPS itself allows.