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Depth resolution factor of a static gaussian ion beam
Author(s) -
Malherbe J. B.,
Sanz J. M.,
Hofmann S.
Publication year - 1981
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740030602
Subject(s) - gaussian , resolution (logic) , auger electron spectroscopy , gaussian function , ion , spectroscopy , ion beam , auger , x ray photoelectron spectroscopy , atomic physics , gaussian beam , optics , chemistry , physics , beam (structure) , materials science , nuclear magnetic resonance , nuclear physics , computational chemistry , organic chemistry , quantum mechanics , artificial intelligence , computer science
The dependence of the depth resolution on the contribution of a Gaussian crater shape and the finite width of a Gaussian excitation beam (and/or Gaussian acceptance function) is considered. The results show that for Auger electron spectroscopy depth profiling, the contribution of the beam shapes to the depth resolution can, in most cases, be neglected. With X‐ray photoelectron spectroscopy and secondary ion mass spectroscopy depth profiling, care has to be taken to obtain a well resolved depth profile.