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Rutherford back scattering and auger electron spectroscopy analysis of the oxygen distribution in the Al—Ag system evaporated at 10 −4 Torr
Author(s) -
Oliver Alicia,
Santibáñez Federico Garcia
Publication year - 1981
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740030507
Subject(s) - auger electron spectroscopy , torr , evaporation , analytical chemistry (journal) , electron spectroscopy , auger , scattering , rutherford scattering , sputtering , chemistry , oxygen , spectroscopy , atomic physics , rutherford backscattering spectrometry , ion , auger effect , thin film , materials science , inelastic scattering , nuclear physics , x ray raman scattering , physics , optics , nanotechnology , organic chemistry , chromatography , quantum mechanics , thermodynamics
An analysis of the Al‐Ag system on thin films carried out through Rutherford back scattering and Auger electron spectroscopy combined with ion sputtering is reported. The films were prepared by evaporation on vitreous carbon under vacuum pressures of 1 × 10 −4 Torr. The results show different distributions of oxygen depending upon the order of A1 evaporation.