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Selected area X‐ray photoelectron spectroscopy
Author(s) -
Keast D. J.,
Downing K. S.
Publication year - 1981
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740030209
Subject(s) - x ray photoelectron spectroscopy , x ray , square (algebra) , materials science , analytical chemistry (journal) , chemistry , optics , physics , nuclear magnetic resonance , geometry , mathematics , environmental chemistry
A technique is described which enables selected areas of a specimen to be located and examined using XPS. Results obtained using the technique are given which indicte that areas less than 0.5 mm square can be analysed.