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Electron beam effects in Auger electron spectroscopy and scanning electron microscopy
Author(s) -
Fontaine J. M.,
Duraud J. P.,
Le Gressus C.
Publication year - 1979
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740010606
Subject(s) - auger electron spectroscopy , scanning electron microscope , analytical chemistry (journal) , electron beam induced deposition , electron spectroscopy , energy dispersive x ray spectroscopy , secondary electrons , chemistry , electron , spectroscopy , electron beam processing , auger effect , atomic physics , energy filtered transmission electron microscopy , materials science , scanning transmission electron microscopy , auger , physics , chromatography , quantum mechanics , nuclear physics , composite material
Electron beam effects on Si(100) and 5% Fe/Cr alloy samples have been studied by measurements of the secondary electron yield δ, determination of the surface composition by Auger electron spectroscopy and imaging with scanning electron microscopy. Variations of δ as a function of the accelerating voltage E p (0.5