Electron beam effects in Auger electron spectroscopy and scanning electron microscopy | Zendy

Fontaine J. M. | Zendy; Duraud J. P. | Zendy; Le Gressus C. | Zendy

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Electron beam effects in Auger electron spectroscopy and scanning electron microscopy

Author(s) -

Fontaine J. M.,

Duraud J. P.,

Le Gressus C.

Publication year - 1979

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.740010606

Subject(s) - auger electron spectroscopy , scanning electron microscope , analytical chemistry (journal) , electron beam induced deposition , electron spectroscopy , energy dispersive x ray spectroscopy , secondary electrons , chemistry , electron , spectroscopy , electron beam processing , auger effect , atomic physics , energy filtered transmission electron microscopy , materials science , scanning transmission electron microscopy , auger , physics , chromatography , quantum mechanics , nuclear physics , composite material

Electron beam effects on Si(100) and 5% Fe/Cr alloy samples have been studied by measurements of the secondary electron yield δ, determination of the surface composition by Auger electron spectroscopy and imaging with scanning electron microscopy. Variations of δ as a function of the accelerating voltage E p (0.5

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