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Quantitative auger electron spectroscopy: Modulating the spectrometer
Author(s) -
Seah M. P.
Publication year - 1979
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740010305
Subject(s) - auger electron spectroscopy , spectrometer , auger , modulation (music) , electron spectrometer , auger effect , spectrum analyzer , electron spectroscopy , chemistry , spectral line , electron , spectroscopy , x ray photoelectron spectroscopy , atomic physics , analytical chemistry (journal) , optics , physics , nuclear magnetic resonance , cathode ray , acoustics , quantum mechanics , astronomy , chromatography , nuclear physics
As part of an on‐going programme at the National Physical Laboratory on the quantification of surface spectroscopies, it is shown that, in using the modulation technique for quantitative Auger electron spectroscopic analysis in the differential mode, care must be taken in applying the modulation. With the complex electron spectrometers now being employed for combined X‐ray photoelectron and Auger spectroscopic work, error signals can be added into the spectra by several of the proposed systems of modulation. The error signals are analysed quantitatively and are shown to be important at energies below 200 eV. Similar error signals can be found in the case of the cylindrical mirror analyzer. To obtain the correct derivative spectrum care must be taken to modulate the whole electron spectrometer with AC levels in strict proportionality to the incremental DC changes appropriate to each of the electrodes.