Premium
Surface acoustic wave relative humidity sensor based on sputtering SiO 2 film
Author(s) -
Yan Xiaopeng,
Li Cuiping,
Zhao Lei,
Tian Shuzhen,
Zhang Zeyu,
Li Mingji,
Li Hongji,
Qian Lirong,
Gong Xiaonan,
Huang Yihang,
Hou Tao,
Bai Haibin,
Yang Baohe
Publication year - 2021
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6989
Subject(s) - surface acoustic wave , sputtering , relative humidity , desorption , materials science , hysteresis , humidity , repeatability , adsorption , resonator , surface acoustic wave sensor , thin film , analytical chemistry (journal) , substrate (aquarium) , optoelectronics , chemistry , acoustics , nanotechnology , chromatography , physics , oceanography , organic chemistry , quantum mechanics , geology , thermodynamics
A surface acoustic wave (SAW) relative humidity (RH) sensor was prepared by sputtering SiO 2 sensing film on the total surface of an SAW resonator. The prepared humidity sensor exhibits good linear relationship under wide RH range of 10%–80%. Small hysteresis is observed during the adsorption and desorption processes. The sensitivity of the sensor is −1.14 kHz/% for the adsorption process and −1.06 kHz/% for the desorption process. The sensing mechanism of the sensor can be explained from the mass loading effect of the SiO 2 film. The response time is 6.0 s and the recovery time is 21.3 s when the RH switches between 10% and 70%. Moreover, the SAW sensor also shows good repeatability and stability due to the high adhesion of the sputtering SiO 2 film to the substrate.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom