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The state of individual layers and interfaces in multilayer nanostructures [( C o 40 F e 40 B 20 ) 34 ( S i O 2 ) 66 / Z n O / C ] 46
Author(s) -
Yurakov Yury A.,
Peshkov Yaroslav A.,
Ivkov Sergey A.,
Kannykin Sergey V.,
Sitnikov Alexander V.,
Domashevskaya Evelina P.
Publication year - 2021
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6908
Subject(s) - materials science , amorphous solid , substrate (aquarium) , nanocrystalline material , silicon , layer (electronics) , oxide , dielectric , diffraction , carbon fibers , composite number , analytical chemistry (journal) , nanotechnology , crystallography , composite material , optics , metallurgy , optoelectronics , oceanography , chemistry , physics , chromatography , geology
The multilayer nanostructures have drawn attention in fields from spintronics to microwave electronics. The purpose of this work was to determine the composition of individual layers and to control interfaces in three‐layer superstructures [(Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 /ZnO/C] 46 by means of X‐ray diffraction and X‐ray reflectivity. The samples with different thicknesses of metal‐containing composite layers together with zinc oxide and carbon interlayers were deposited on the glass substrate by ion‐beam sputtering of three targets, one of which was a composite (Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 . X‐ray diffraction results showed the X‐ray amorphous state of the ferromagnetic metal clusters CoFeB, the dielectric matrix of silicon oxide SiO 2 , and carbon interlayers. However, the intermediate layers of the zinc oxide ZnO were found to have a nanocrystalline structure. The X‐ray reflectivity measurements indicate a good agreement between the experimental and nominal values of both the periods of three‐layer superstructures and the thicknesses of metal‐containing composite layers and interlayers.