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Comparison of GO and polymer microcapacitors prepared by ion beam writing
Author(s) -
Malinský Petr,
Romanenko Oleksandr,
Havránek Vladimir,
Hnatowicz Vladimir,
Stammers James Henry,
Cutroneo Mariapompea,
Novák Josef,
Slepička Petr,
Svorčík Václav,
Szőkölová Kateřina,
Bouša Daniel,
Sofer Zdeněk,
Macková Anna
Publication year - 2020
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6851
Subject(s) - materials science , elastic recoil detection , raman spectroscopy , spectroscopy , irradiation , graphene , x ray photoelectron spectroscopy , scanning electron microscope , carbon fibers , analytical chemistry (journal) , ion beam , microstructure , ion , chemical engineering , composite material , nanotechnology , chemistry , optics , thin film , composite number , physics , engineering , organic chemistry , chromatography , quantum mechanics , nuclear physics
Carbon beam writing was employed as a method for maskless production of microscale capacitors in both insulating graphene oxide (GO) and poly(methyl methacrylate) (PMMA) matrix. The GO and PMMA foils were irradiated using a 5‐MeV C 3+ beam with micrometer scale resolution. As follows, the shape of the created microstructures and compositional changes was studied using the scanning electron microscopy/energy‐dispersive X‐ray spectroscopy method (SEM/EDS). The structural and compositional progression was characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS), and elastic recoil detection analysis (ERDA) spectroscopy. The improvement of the prepared structures' electrical properties was also studied, and it can be concluded that carbon irradiation leads to the removal of oxygen and hydrogen and to growth of the carbon domains, which is connected with the conductivity increase of the irradiated parts and capacitance of the final products in the order of pF.