Premium
Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces
Author(s) -
Joulaei Mahdi,
Kolahdoozan Mojtaba,
Salehi Mehdi,
Zadsar Mehdi,
Vahabi Meisam
Publication year - 2019
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6597
Subject(s) - adhesion , coating , microelectromechanical systems , layer (electronics) , materials science , substrate (aquarium) , composite material , evaporation , force spectroscopy , deposition (geology) , nanotechnology , atomic force microscopy , paleontology , oceanography , physics , sediment , biology , thermodynamics , geology
Adhesion force is one of the most important factors in microelectromechanical systems (MEMS), especially for microassembly. It depends on operating conditions and is affected by the contact area. In this study, the adhesion force between MEMS materials and AFM tips was analysed using AFM's point‐mode spectroscopy. The aim was to study the effectiveness of various coatings in MEMS adhesion surfaces. For this purpose, five silicon surfaces were used, four of which were coated, and one was noncoated. Two of them were deposited by single‐layer coating (Au and Ag). The other two were deposited by double‐layer coating (TiO 2 /Au, TiO 2 /Ag) on a Si (1 0 0) substrate. The depositing was accomplished by the thermal evaporation method. Composite materials and analysis were reviewed by observing the SEM image. The experimental results showed that the method of deposition helped to decrease the adhesion force between the probe tip and the surface of the specimens, and double‐layer coating had stronger effect on decreasing the adhesion force than the single‐layer coating.