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Bombardment‐induced light emission of clean and oxygen‐covered Al, Cu, and Cu x Al 1‐x targets
Author(s) -
Ait El Fqih Mohammed,
Afkir Ahmad,
El Boujlaidi Abdelaziz,
Jadoual Lamia,
Jourdani Raja,
Kaddouri Abdelilah
Publication year - 2018
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6513
Subject(s) - sputtering , oxygen , yield (engineering) , ion , materials science , atomic physics , analytical chemistry (journal) , chemistry , metallurgy , nanotechnology , thin film , physics , environmental chemistry , organic chemistry
Light emission during 5 keV Kr + ion bombardment of Cu, Al, and CuAl alloys with different concentration is studied. The transient effect phenomenon has been investigated under two pressure conditions: one at base pressure (approximately 10 −7 Pa) and the other with introduction of oxygen gas (approximately 10 −4 Pa). The experimental oxygen sputtering yield was compared with simulation using the SRIM‐code program. Both of them were in fairly good agreement.