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Influence of post‐annealing on a diamondlike carbon film analyzed by Raman spectroscopy
Author(s) -
Takabayashi Susumu,
Okamoto Keishi,
Nakatani Tatsuyuki
Publication year - 2018
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6387
Subject(s) - raman spectroscopy , annealing (glass) , dangling bond , materials science , carbon film , diamond like carbon , analytical chemistry (journal) , carbon fibers , spectroscopy , chemical engineering , thin film , nanotechnology , chemistry , silicon , composite material , metallurgy , optics , organic chemistry , composite number , physics , engineering , quantum mechanics
The influence of a post‐annealing treatment on the chemical structure of a diamondlike carbon (DLC) film was clarified by Raman spectroscopy. The DLC films were synthesized by ionized deposition. The structures were elucidated via Raman analysis in conjunction with the sp 2 cluster model. The as‐prepared DLC film consisted of a dielectric matrix including sp 3 carbon, where sp 2 clusters were floating. When the post‐annealing treatment commenced, especially between 450 and 600°C, carbon─hydrogen bonds were cleaved, and the hydrogen atoms were desorbed from the film, creating defects or dangling bonds. The defects were reactive in growing sp 2 clusters that were strained with numerous defects because of the restricted degrees of freedom in the solid. As the post‐annealing temperature further increased, the clusters became dominant and the strain was gradually dissolved.