Premium
Cover Image, Volume 49, Issue 10
Author(s) -
Penley C.,
Bekka S.
Publication year - 2017
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Reports
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6314
Subject(s) - cover (algebra) , photomask , volume (thermodynamics) , degradation (telecommunications) , haze , enhanced data rates for gsm evolution , computer science , materials science , computer vision , nanotechnology , physics , engineering , layer (electronics) , meteorology , telecommunications , resist , mechanical engineering , quantum mechanics
The cover image, by C. Penley and S. Bekka, is based on the Research Article Characterization and reduction of pellicle degradation due to haze formation on leading edge technology photomasks , DOI: 10.1002/sia.6258 .