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Abundance of field‐ionized ion species and current stability of ion beam emitted in He–Ne gas mixture
Author(s) -
Komaki Keisuke,
Nagai Shigekazu,
Iwata Tatsuo,
Kajiwara Kazuo,
Hata Koichi
Publication year - 2016
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6091
Subject(s) - ion current , ion , chemistry , ion source , ion beam deposition , current (fluid) , ion beam , mass spectrometry , ion gun , atomic physics , analytical chemistry (journal) , beam (structure) , ionization , physics , optics , chromatography , organic chemistry , thermodynamics
An attempt to increase the He ion current of a gas field ion source is made using a He–Ne mixture. The abundance of each ion in the produced ion beam is examined as a function of the applied field, along with the composition of the supplied gas mixture, using a field ion microscope equipped with a time‐of‐flight mass spectrometer. The operating conditions under which the He ion current is enhanced and no Ne ions are detected are confirmed. For the conditions under which He and Ne ions are detected simultaneously, a spike‐like current change showing the positive correlation between each ion current is observed. Copyright © 2016 John Wiley & Sons, Ltd.