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High spatial resolution imaging of helium isotope by TOF‐SNMS
Author(s) -
Bajo Kenichi,
Itose Satoru,
Matsuya Miyuki,
Ishihara Morio,
Uchino Kiichiro,
Kudo Masato,
Sakaguchi Isao,
Yurimoto Hisayoshi
Publication year - 2016
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.6085
Subject(s) - mass spectrometry , ionization , laser , image resolution , impact crater , helium , chemistry , optics , ion , resolution (logic) , analytical chemistry (journal) , physics , organic chemistry , chromatography , astronomy , artificial intelligence , computer science
Laser ionization mass nanoscope is a time‐of‐flight sputtered neutral mass spectrometer associated with laser post‐ionization by tunneling effect. A spherical and chromatic aberration corrector is installed in the primary ion column. The lateral spatial resolving power of He imaging of solid surface has been evaluated by scanning image using a probe diameter of 90 nm from crater edge slope of a He ion‐implanted Si substrate. Helium distribution from the scanning image is quantitatively equivalent with depth profiling analysis from surface of the same substrate, indicating that spatial resolving power of 20 nm for depth resolution has been achieved on the He scanning image through use of oblique incident effect of the primary beam. Copyright © 2016 John Wiley & Sons, Ltd.