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Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)‐doped carbon‐based coatings
Author(s) -
Zhang Renhui,
Lu Zhibin
Publication year - 2015
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5798
Subject(s) - microstructure , materials science , raman spectroscopy , x ray photoelectron spectroscopy , tribology , amorphous solid , composite material , carbon fibers , plasma enhanced chemical vapor deposition , chemical vapor deposition , doping , amorphous carbon , chemical engineering , nanotechnology , crystallography , chemistry , optics , composite number , optoelectronics , engineering , physics
In this paper, the amorphous carbon‐based coatings containing F and Si (a‐C:F:Si) are successfully fabricated using a plane hollow cathode plasma‐enhanced chemical vapor deposition method. The results show that the mechanical properties of these coatings, such as hardness, elastic modulus, friction and wear, are closely affected by the content of F and Si. We systematically examine the microstructure and composition of these coatings using SEM, XPS, AFM and Raman for understanding of the underlying frictional mechanism. Copyright © 2015 John Wiley & Sons, Ltd.