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Development of organic SIMS system with Ar‐GCIB and IMS‐4f
Author(s) -
Nojima Masashi,
Suzuki Masato,
Fujii Makiko,
Seki Toshio,
Matsuo Jiro
Publication year - 2014
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5671
Subject(s) - chemistry , ion , analytical chemistry (journal) , secondary ion mass spectrometry , static secondary ion mass spectrometry , polystyrene , cluster (spacecraft) , mass spectrometry , polymer , chromatography , organic chemistry , computer science , programming language
We have developed Ar‐gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar‐GCIB column to IMS‐4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10 nm depth resolutions. Secondary ion images of fine‐patterned PS are observed within 10 µm image resolutions. Copyright © 2014 John Wiley & Sons, Ltd.