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XPS depth analysis of metal/polymer multilayer by vacuum electrospray droplet impact
Author(s) -
Sakai Yuji,
Takaishi Rio,
Ninomiya Satoshi,
Hiraoka Kenzo
Publication year - 2015
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5669
Subject(s) - polycarbonate , polyimide , polymer , electrospray , etching (microfabrication) , metal , x ray photoelectron spectroscopy , analytical chemistry (journal) , materials science , chemical engineering , chemistry , nanotechnology , polymer chemistry , mass spectrometry , composite material , metallurgy , chromatography , layer (electronics) , engineering
Recently, the vacuum electrospray droplet impact (V‐EDI) was developed as a cluster ion beam source in our laboratory. In this work, V‐EDI was applied to polymers [polyimide (PI) and polycarbonate (PC)] and metal/polymer multilayer samples (Au/PI and Au/PC). We compared the etching performance of V‐EDI with that obtained by the conventional atmospheric‐pressure EDI (A‐EDI). The nonselective etching was observed for organic and also inorganic samples by V‐EDI as by A‐EDI. Etching rates for the metal and polymer analysis by V‐EDI were almost the same as those observed by A‐EDI. The interlayer components were clearly observed by V‐EDI for multilayer samples of Au and synthetic polymers. Copyright © 2014 John Wiley & Sons, Ltd.