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Si − useful yields measured in Si, SiC, Si 3 N 4 and SiO 2 : comparison between the Storing Matter technique and SIMS
Author(s) -
Kasel B.,
Wirtz T.
Publication year - 2014
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5607
Subject(s) - yield (engineering) , matrix (chemical analysis) , silicon , analytical chemistry (journal) , secondary ion mass spectrometry , chemistry , materials science , ion , metallurgy , environmental chemistry , chromatography , organic chemistry
The storing matter technique was developed to tackle quantification issues encountered in SIMS due to matrix effects. Here, we demonstrate the quantitative capabilities of the technique by comparing the useful yield for Si − in different matrices exhibiting matrix effects in conventional SIMS analysis. Additionally, the effect of the collector material (Ag, Au, Cu and Ta) on the storing matter useful yield is investigated. Copyright © 2014 John Wiley & Sons, Ltd.