Premium
High‐resolution imaging and X‐ray microanalysis in the FE‐SEM
Author(s) -
Brodusch Nicolas,
Demers Hendrix,
Trudeau Michel,
Gauvin Raynald
Publication year - 2014
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5584
Subject(s) - characterization (materials science) , microanalysis , field emission gun , diffraction , materials science , acceleration voltage , scanning electron microscope , nanoscopic scale , nanomaterials , x ray , resolution (logic) , dislocation , nanotechnology , optics , electron , chemistry , physics , composite material , computer science , cathode ray , organic chemistry , quantum mechanics , artificial intelligence
Based on results recorded on real materials with new generation field‐emission scanning electron microscopes (FE‐SEMs), the actual potential of the technique is evaluated. Nanoscale characterization of bulk and nanomaterials using Z‐contrast imaging, X‐rays and Kikuchi diffraction is presented. The advantage of using the full range of accelerating voltages of the FE‐SEM is demonstrated on an energy storage material, and the benefit of using diffraction contrast imaging in bulk crystalline materials to characterize stacking faults, dislocation structures and nanotwins is illustrated. Copyright © 2014 John Wiley & Sons, Ltd.