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Bonding structure and mechanical properties of carbon nitride bilayer films with Ti and TiN interlayer
Author(s) -
Zhou Bing,
Jiang Xiaohong,
Rogachev A. V.,
Piliptsou D. G.,
Sun Dongping,
Shen Ruiqi
Publication year - 2014
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5558
Subject(s) - tin , bilayer , raman spectroscopy , materials science , x ray photoelectron spectroscopy , annealing (glass) , monolayer , crystallography , nitride , analytical chemistry (journal) , chemical engineering , chemistry , nanotechnology , layer (electronics) , composite material , metallurgy , organic chemistry , biochemistry , membrane , engineering , physics , optics
Carbon nitride (CN x ) bilayer films with Ti and TiN interlayer were synthesized by cathode arc technique at various nitrogen pressures (P N2 ). The dependences of microstructure and bonding composition of the films on the P N2 and interlayer were analyzed by Raman spectroscopy and X‐ray photoelectron spectroscopy. Microstructure evolution consisting of the ordering and size of Csp 2 clusters, the faction of N–sp 3 /N–sp 2 bonds and graphite‐like/pyridine‐like configurations was dominated by P N2 , interlayer and annealing. The results showed that Ti and TiN interlayer decrease the atomic ratio of N/C and increase clustering Csp 2 . High P N2 induces the formation of C ≡ N and C − N bonds, the increase of sp 2 ‐bonding content and the growth of Csp 2 clusters. A large part of nitrogen atoms are coordinated with sp 2 ‐hybridized carbon (minimum 71% for annealed CN x monolayer). TiN/CN x bilayer had a higher content of pyridine‐like configuration. Morphological characteristics of CN x monolayer and bilayer mainly depend on the surface character (roughness and surface energy) of the sublayer. The internal stress in the as‐deposited Ti/CN x bilayer is smaller, but it after annealing is higher than that of CN x monolayer and TiN/CN x bilayer. These results may be of interest for studying the CN x films with controlled bonding composition and expected engineering properties. Copyright © 2014 John Wiley & Sons, Ltd.