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Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS
Author(s) -
Lorinčík J.,
Kašík I.,
Vaniš J.,
Sedláček L.,
Dluhoš J.
Publication year - 2014
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5536
Subject(s) - dopant , materials science , optical fiber , secondary ion mass spectrometry , imaging spectrometer , fiber , mass spectrometry , optics , resolution (logic) , analytical chemistry (journal) , doping , time of flight , spectrometer , optoelectronics , chemistry , physics , composite material , computer science , chromatography , artificial intelligence
The analysis of doping element distribution in optical fiber cross sections requires a sensitive high spatial resolution technique. We demonstrate that a compact orthogonal Time‐of‐Flight (TOF) mass spectrometer attached to a multitechnique FIB‐SEM‐EDX system can be used to analyze cross sections of as manufactured optical fibers. By performing quantitative Energy Dispersive X‐Ray (EDX) analysis of the optical preform, from which the fibers were drawn, we obtained conversion factors, which enabled the quantification of the Focused Ion Beam (FIB) SIMS profiles of the fiber cross sections. Copyright © 2014 John Wiley & Sons, Ltd.