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An analytical depth resolution function for the MRI model
Author(s) -
Liu Y.,
Hofmann S.,
Wang J. Y.
Publication year - 2013
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5319
Subject(s) - resolution (logic) , convolution (computer science) , function (biology) , simple (philosophy) , surface finish , layer (electronics) , dirac delta function , mixing (physics) , materials science , analytical chemistry (journal) , computational physics , chemistry , optics , physics , computer science , mathematics , mathematical analysis , artificial intelligence , nanotechnology , composite material , chromatography , philosophy , epistemology , quantum mechanics , evolutionary biology , artificial neural network , biology
The mixing roughness information depth model is frequently used for the quantification of sputter depth profiles. In general, the solution of the convolution integral for any kind of in‐depth distributions is achieved by numerical methods. For a thin delta layer, an analytical depth resolution function is presented, which enables a simple and user‐friendly quantification of measured delta layer profiles in AES, XPS and SIMS. Copyright © 2013 John Wiley & Sons, Ltd.