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Origin of differences between MCs + and MCs 2 + SIMS depth profiles
Author(s) -
Miyamoto Takashi,
Numao Shigenori,
Hasegawa Takahiro,
Karen Akiya
Publication year - 2013
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5163
Subject(s) - electronegativity , analytical chemistry (journal) , chemistry , ion , secondary ion mass spectrometry , matrix (chemical analysis) , mass spectrometry , atomic physics , radiochemistry , physics , chromatography , organic chemistry
For secondary ion mass spectrometry of highly electronegative elements, the MCs 2 + method provides greater sensitivity but may sometimes afford a different depth profile than the conventional MCs + method for the same sample. Here, we report the difference system not only from the electronegativity of the elements but also from the electronegativity of the matrix. Copyright © 2012 John Wiley & Sons, Ltd.