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Conductivity of ITO film amplified by multi‐step ion beam‐treatment on PET layers at room temperature
Author(s) -
Son Phil Kook,
Choi SukWon,
Kim Sung Soo,
Gwag Jin Seog
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5097
Subject(s) - materials science , indium tin oxide , ion beam , polyethylene terephthalate , amorphous solid , ion beam assisted deposition , crystal (programming language) , electrical resistivity and conductivity , sputtering , ion , deposition (geology) , single crystal , optoelectronics , layer (electronics) , analytical chemistry (journal) , thin film , nanotechnology , composite material , chemistry , crystallography , organic chemistry , electrical engineering , paleontology , engineering , sediment , computer science , programming language , biology
In this paper, we investigate poly‐crystal indium tin oxide (ITO) film produced by a multi‐step ion beam treatment on polyethylene terephthalate (PET) at room temperature. In the process of ITO film deposition by a sputtering method, we perform an ion beam treatment after some quantity of ITO deposition is complete, and this process is carried out repeatedly until the required film thickness is achieved. X‐ray diffraction indicates that the ITO film deposited by our multi‐step ion beam treatment has an almost poly‐crystal structure with a morsel of amorphous structure in the PET layers. As a supplementary measurement, a contact angle method shows that the poly‐crystal structure is due to a surface charge effect. Consequently, the electrical conductivity of the ITO film (resistivity measurement error bar < 0.7%) with the multi‐step ion beam treatment is eight times higher than that of single‐treated ITO film, due to this poly‐crystal structure. Copyright © 2012 John Wiley & Sons, Ltd.