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The high‐temperature tribological properties of Si‐DLC films
Author(s) -
Yang Baoping,
Zheng Yu,
Zhang Bin,
Wei Li,
Zhang Junyan
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5094
Subject(s) - materials science , diamond like carbon , silicon , tribology , annealing (glass) , sputter deposition , hydrogen , carbon fibers , methane , carbon film , sputtering , argon , chemical engineering , thin film , composite material , nanotechnology , metallurgy , chemistry , composite number , organic chemistry , engineering
The tribological properties of Silicon‐containing diamond‐like‐carbon (Si‐DLC) films, deposited by magnetron sputtering Si target in methane/argon atmosphere, were studied in comparison with diamond‐like‐carbon (DLC) films. The DLC films disappeared because of the oxidation in the air at 500 °C, whereas the Si‐DLC films still remained, implying that the addition of Si improved significantly the thermal stability of DLC films. Retarded hydrogen release from DLC film at high temperature and silicon oxide on the surface might have contributed to lower friction coefficient of the Si‐DLC films both after annealing treatment and in situ high‐temperature environment. Copyright © 2012 John Wiley & Sons, Ltd.